The Micro-Nano Device Fabrication Center is an open-access R&D and prototyping facility focused on heterogeneous integration technologies. Supported by state-of-the-art infrastructure and engineering expertise, the Center provides comprehensive capabilities in process development, technology validation, prototype fabrication, and technology transfer.
By bringing together researchers, startups, and industrial partners, the Center accelerates the transition from innovative ideas to manufacturable technologies and real-world applications in microelectronics, photonics, and advanced packaging.

Dedicated to advanced materials and related devices, the center offers integrated analytical and characterization services, including chemical composition analysis, physical property measurement, microstructural and surface characterization, reliability evaluation, and failure analysis, providing comprehensive support from diagnosis to solution development.

The Advanced Materials Microstructural Imaging and Characterization Center is a world-class electron microscopy facility equipped with nearly ten state-of-the-art instruments, including the Iliad Ultra and the Spectra 300 with Lorentz aberration-corrected STEM capabilities. Integrated with next-generation high-sensitivity, high-dynamic-range, and high-speed detectors, the Center provides comprehensive capabilities in ultra-high-resolution imaging, in situ dynamic characterization, and multimodal correlative analysis. Spanning length scales from individual atoms to complex nanoscale architectures, the Center enables precise structural and functional characterization of advanced materials. Through cutting-edge instrumentation, expert technical support, and open access to the scientific community, the Center advances discoveries in materials science, energy technologies, electronic information materials, and advanced manufacturing, driving scientific excellence, technological innovation, and the development of future research talent.